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Invention and Engineering

Excimer laser

Excimer laser
Excimer laser

An excimer laser, sometimes more correctly called an exciplex laser, is a form of ultraviolet laser which is commonly used in the production of microelectronic devices, semiconductor based integrated circuits or "chips", eye surgery, and micromachining. Since the 1990s, excimer lasers have been widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing.

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Text from Wikipedia; plate via Wikimedia Commons. Text CC BY-SA 4.0; plate freely licensed (see Commons). Source record. Images and catalogue data are reproduced from open-access collections.

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